Canon FPA-3030i5+ Specificaţii

Model Type

i-Line (365nm) Stepper

Wafer Size

200mm; 150mm

Resolution

≤0.35µm

Numerical Aperture (NA)

0.45 ~ 0.63

Reticle Size

6in. (0.25in. thick); optional 5in.

Reduction Ratio

5:1

Field Size

22mm x 22mm

Overlay Accuracy

≤40nm (|m|+3)

Throughput

≥104wph (200mm) ≥120wph (150mm)